["TECHNOLOGY & ENGINEERING \/ Electrical","TECHNOLOGY & ENGINEERING \/ Mechanical","Microelectromechanical systems.","MECHANICAL ENGINEERING (GENERAL)","MICROELECTRONICS","Microelectromechanical systems.","Non-Fiction","SCI\/TECH","Scholarly\/Undergraduate","Science\/Math","TECHNOLOGY & ENGINEERING \/ Electrical","TECHNOLOGY & ENGINEERING \/ Mechanical","Textbooks (Various Levels)","United States"]